| Номер документа в системі: | 218306 |
| Автор: | Lisenkov A. A., Valuev V. P., Sanchugov E. L. |
| Назва документа: | Research of the vacuum arc discharge on integrally cold cathode during coating processes |
| УДК | 537.525.5 |
| Мова документу | Англійська |
| Аннотація | The vacuum arc plasma source of extended design generating the directed belt plasma stream and operating in pulse mode was presented. The researches carried out gave additional information about development of the cathode spots of the vacuum arc discharge. It is found that the cathode spots' motion speed depends on the cathode temperature. |
| Кількість сторінок | С. 66-71. |