Gorbenko V. I., Gorban A. N.

Thermal decomposition of indium phosphide in vacuum and atomic hydrogen environment


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Номер документа в системі:221670
Автор:Gorbenko V. I., Gorban A. N.
Назва документа:Thermal decomposition of indium phosphide in vacuum and atomic hydrogen environment
УДК621.315.5+544.03
Мова документуАнглійська
АннотаціяThe thermal decomposition of indium phosphide has been investigated by Auger-electron spectroscopy and mass-spectroscopy. Scanning electron microscopy has been used for study of indium islands growth on surface of the compound semiconductor. The role ofatomic hydrogen in processes of decomposition and growth of metallic islands was determined by comparing with these processes under vacuum.
Кількість сторінокС. 7-10.
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